A Hybrid simulation of the High Pressure Sputtering, Combining Monte Carlo Method and Diffusive Approach

98/08/31


Start


INDEX

Title

Particle Transfer during Sputtering Deposition

Monte Carlo Simulation

Concept

Diffusion Equation

Boundary Integration

Implementation

Computing Environment

BEM and Monte Carlo

Thermal Threshold

Comparison with Experiment

Summary

 Author :Takeo Nakano

E-mail : nakano@apm.seikei.ac.jp

Home Page : http://surf.ap.seikei.ac.jp/~nakano/

Organization :
Dept. of Applied Physics Seikei University