slide No. 9 / 15

These are some optical emission spectra from the magnetron sputtering plasma. Horizontal axis is the wavelength and vertical is the intensity, which is an out put of A/D converter. The acquisition time of these spectra is 2 seconds.

Left is the spectrum taken at 1 Pa, and the right is at 20 Pa. You can see, with increase in pressure, some lines (around 340 nm) grow, some (around 500) grows more rapidly and some (around 400) does not change so much.